Design of temperature compensated radio frequency free-free beam MEMS resonators using a commercial process
Bibliographic record
Abstract
We present the design and simulation of temperature compensated Radio-Frequency (RF) Free-Free (FF) beam MEMS resonators that are developed using PolyMUMPS, which is a commercial multi-user process available from MEMSCAP. The proposed devices, which operate at 10MHz and 20MHz, are designed using CoventorWare finite element modeling software. We present a novel and effective temperature compensation strategy that is achieved using structural layer of gold (Au) that is patterned on the resonator devices. Au is a standard layer available in PolyMUMPS, thus allowing the compensated devices to be fabricated in the standard process. The performance of Au layer temperature compensated composite devices were evaluated and compared with uncompensated devices and with devices compensated with silicon dioxide (SiO2). For example, considering the 20MHz resonator, devices compensated with Au layer gave the best temperature coefficient of frequency (TCF) of -1.66ppm/°C compared with SiO2(-6.38ppm/oC) and uncompensated (-8.48ppm/°C) devices between the temperature range of -50°C to +125°C.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".