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Record W1966321518 · doi:10.1063/1.2345030

Passivation of air-exposed AlGaAs using low frequency plasma-enhanced chemical vapor deposition of silicon nitride

2006· article· en· W1966321518 on OpenAlexaff
Abdelatif Jaouad, Vincent Aimez

Bibliographic record

VenueApplied Physics Letters · 2006
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsUniversité de Sherbrooke
Fundersnot available
KeywordsPassivationSilicon nitrideChemical vapor depositionMaterials sciencePlasma-enhanced chemical vapor depositionOptoelectronicsSiliconSemiconductorCapacitancePlasmaAnalytical Chemistry (journal)ElectrodeNanotechnologyChemistryLayer (electronics)

Abstract

fetched live from OpenAlex

The authors report on the development of a simple passivation technique of air-exposed AlxGa1−xAs using (NH4)2S treatment and low frequency plasma-enhanced chemical vapor deposition of silicon nitride. Metal-insulator-semiconductor capacitors were fabricated on p-AlxGa1−xAs substrates and characterized using capacitance-voltage and conductance-frequency measurements. Modulation of the surface potential is observed and unpinning of Fermi level is demonstrated. The minimum interface state density as estimated using conductance method is in the order of (2–3)×1012cm−2eV−1. The passivation potential of the low frequency plasma may be explained by the high level of hydrogen bombardment of the substrate.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.035
Threshold uncertainty score0.692

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.009
GPT teacher head0.190
Teacher spread0.182 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations26
Published2006
Admission routes1
Has abstractyes

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