High-performance n-channel 13.56MHz plasma-enhanced chemical vapor deposition nanocrystalline silicon thin-film transistors
Bibliographic record
Abstract
Hydrogenated nanocrystalline silicon (nc-Si:H) films were directly deposited by using 13.56MHz plasma-enhanced chemical vapor deposition at a substrate temperature of 260°C with highly hydrogen (H2) diluted silane (SiH4) gases. The nc-Si:H film showed a high Raman crystalline volume fraction (XC∼85%) and low oxygen concentration (CO∼1.5×1017at.∕cm3). The formation of high-quality nc-Si:H is explained in terms of the effective roles of atomic hydrogen in the plasma. Top-gate staggered n-channel thin-film transistors (TFTs) adopting 90–100nm nc-Si:H channel and ∼300nm hydrogenated amorphous silicon oxide (a-SiOx) gate dielectric layers showed a field-effect mobility (μFE) of ∼150cm2∕Vs, a threshold voltage (VT) of ∼2V, a subthreshold slope (S) of ∼0.23V∕dec, and an on/off current ratio of more than 106. The TFT performance reported here offers promise for the total integration of peripheral electronics for active-matrix flat panel systems.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.002 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".