Adhesion Degradation and Water Diffusion in Nanoporous Organosilicate Glass Thin Film Stacks
Bibliographic record
Abstract
The diffusion of water in nanoporous organosilicate glass (NPOSG) film stacks causes significant adhesion degradation of the capping layer on top of the NPOSG. We have used this adhesion degradation to estimate the diffusivity of water in a NPOSG film stack. The effective diffusivity is 1.0 × 10-9 m2/s, nearly two orders of magnitude larger than in previous generations of dense organosilicate glass film stacks. This result is consistent with the diffusion coefficient measured using secondary ion mass spectroscopy and a deuterium oxide tracer. An optical microscopy study yields similar results for the diffusion of toluene in NPOSG film stacks, but the optical technique is not suitable for measuring the diffusion coefficient of water.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".