PECVD deposition and characterization of silicon oxynitride for optical applications
Bibliographic record
Abstract
Silicon oxynitride (SiON) films have been found to possess extremely useful properties for optical applications. In optoelectronics, a major advantage of this material is the ability to tune the refractive index from 1.45 to 2.00, allowing designers the flexibility to custom tailor and optimize the refractive index value in the targeted optical device. In addition, its minimum allowable bending radius is much lower compared to other silica materials. This opens up the possibility of miniaturizing integrated photonic systems. Moreover, silicon oxynitride prepared using Plasma Enhanced Chemical Vapor Deposition (PECVD) can be deposited at high growth rates while exhibiting good homogeneity with wide refractive index tuning range making it a well-suited core layer for planar waveguide technologies and microphotonic devices. In this research work, the deposition process and the properties of SiON are discussed. The obtained refractive index as well as the X-ray photoelectron spectroscopy (XPS) analysis are highlighted. Furthermore, FTIR results as a function of the process parameters are presented and their influence on the film properties is discussed.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".