Fabrication and Characterization of AFM Probe Integrated with High-Aspect-Ratio Diamond Tip
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Bibliographic record
Abstract
In order to realize a smart nano-machining and measurement system based on atomic force microscope (AFM), we have been developing diamond probes with a high-aspect-ratio, sharpened diamond tip. In this paper, we described the most important micromachining techniques for the fabrication of the diamond probes. The high-aspect-ratio diamond microstructures were successfully fabricated by employing our proposed two-step reactive ion etching (RIE) processes. A novel bonding technique of diamond to Si at wafer level was also developed by using an inorganic-organic hybrid sol-gel film (MeSiO 3 /2 ) as an adhesive layer to prepare a diamond/SOI wafer as the starting material. Moreover, we demonstrated the applicability of a fabricated diamond probe not only to AFM measurements but also to a tool for nanomachining.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it