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Record W1976143638 · doi:10.1051/jp4:2005125129

Contamination monitoring of Si wafers using photocarrier radiometry

2005· article· fr· W1976143638 on OpenAlex
Derrick Shaughnessy, Andreas Mandelis, Josias G. Batista

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueJournal de Physique IV (Proceedings) · 2005
Typearticle
Languagefr
FieldEngineering
TopicThermography and Photoacoustic Techniques
Canadian institutionsUniversity of Toronto
Fundersnot available
KeywordsContaminationWaferRadiometryMaterials scienceOpticsOptoelectronicsPhysics

Abstract

fetched live from OpenAlex

The ability of photocarrier radiometry to perform lifetime imaging of Si wafers is reported. The methodology involves PCR imaging of the sample at one or several frequencies with frequency scans performed at positions of interest. The frequency scans are fit to theory to obtain carrier lifetimes that are used in conjunction with the PCR amplitude and phase images to produce lifetime images. The direct correlation between contamination and carrier lifetime in Si allows for generation of contamination/defect concentration images in a completely non-contact, preparation free process suitable for in line monitoring of contamination.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.046
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0010.001
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0000.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.014
GPT teacher head0.255
Teacher spread0.241 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it