Pulsed-laser deposition of high-k titanium silicate thin films
Bibliographic record
Abstract
We report on the growth of high-k titanium silicate (TiSiO4) thin films by means of the pulsed-laser ablation of a TiO2∕SiO2 composite target. We present a systematic investigation of the effect of the oxygen background pressure [P(O2)] and the substrate deposition temperature (Td) on both the structural and electrical properties of the films. Fourier-transform infrared spectroscopy and x-ray photoelectron spectroscopy analyses revealed the presence of Ti–O–Si bonds in the films, confirming thereby the formation of the titanium silicate phase. In particular, the P(O2) is shown to be a key factor for controlling the morphology, the oxygen content, and consequently the electrical properties of the titanium silicate films. Indeed, while the films deposited at P(O2)⩾50mTorr present some porosity, a high roughness, and poor dielectric and breakdown field characteristics, those grown at P(O2)<10mTorr and postannealed (at 600°C in O2) are shown to exhibit a dense and smooth microstructure together with excellent dielectric properties. On the other hand, the resistivity of the vacuum-deposited films is found to decrease remarkably when Td is raised from 20to600°C. Indeed, a strong correlation (over 14 decades) is established between the resistivity of the titanium silicate films and their oxygen content, pointing up the crucial role of their full oxidization. Thus, by identifying the optimal growth conditions, we were able to achieve dense and stoichiometric high-k titanium silicate films combining not only a dielectric constant as high as 33 and a dissipation factor as low as 0.01 but also a high breakdown field of 4MV∕cm.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".