Effect of Heavy Boron Doping on Oxygen Precipitation in Czochralski Silicon Substrates of Epitaxial Wafers
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Bibliographic record
Abstract
The effect of heavy boron doping on oxygen precipitation in Czochralski silicon substrates of epitaxial wafers has been studied with transmission electron microscopy observations and a preferential etching method. Prolonged isothermal annealing between 700 and 1000°C for up to 700 h was performed on p/p+ (5–20 mΩ cm) and p/p− (10 Ω cm) wafers. It was found that, with an increase in boron concentration, the precipitate density increased, and the precipitates could nucleate at a higher temperature. The growth process of platelet precipitates was also investigated and compared with the process in polished p− wafers. It was confirmed that precipitate growth rate in p/p+ wafers was higher than that in p− wafers, and precipitate nucleation in p/p− wafers was delayed compared with p/p+ wafers. The precipitate growth in p/p+ wafers was determined to be reaction‐limited, which differed from the diffusion‐limited growth in p− wafers. © 2000 The Electrochemical Society. All rights reserved.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it