Effect of Heavy Boron Doping on Oxygen Precipitation in Czochralski Silicon Substrates of Epitaxial Wafers
Bibliographic record
Abstract
The effect of heavy boron doping on oxygen precipitation in Czochralski silicon substrates of epitaxial wafers has been studied with transmission electron microscopy observations and a preferential etching method. Prolonged isothermal annealing between 700 and 1000°C for up to 700 h was performed on p/p+ (5–20 mΩ cm) and p/p− (10 Ω cm) wafers. It was found that, with an increase in boron concentration, the precipitate density increased, and the precipitates could nucleate at a higher temperature. The growth process of platelet precipitates was also investigated and compared with the process in polished p− wafers. It was confirmed that precipitate growth rate in p/p+ wafers was higher than that in p− wafers, and precipitate nucleation in p/p− wafers was delayed compared with p/p+ wafers. The precipitate growth in p/p+ wafers was determined to be reaction‐limited, which differed from the diffusion‐limited growth in p− wafers. © 2000 The Electrochemical Society. All rights reserved.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".