Pressure modulated changes in resonance frequency of microchannel string resonators
Bibliographic record
Abstract
Resonating strings have shown promise in a variety of applications including micron-scale mass and temperature sensors. We present microchannel string resonators (MSRs) which have resonance frequency modulated by the internal gauge pressure of silicon nitride microchannels sitting atop the strings. We present an analytical model to predict the pressure sensitivity (Hz/kPa) of the first resonance frequency as well as experimental results for three identical MSRs. While the highest experimental sensitivity of one of the resonators is 5.19 Hz/kPa (0.5 Hz/mbar), the analytical model suggests sensitivity could increase by two orders of magnitude if the microchannels are fabricated at nanometer scale with a length of 10 μm, a channel width of 600 nm, and a channel thickness of 50 nm. The average pressure resolution of the sensors is 0.4 kPa. These results are for a calibrated range of pressure from 50 kPa to 100 kPa (500 mbar to 1000 mbar). However, the analytical model shows that resonance frequency is a linear function of pressure over a range of several MPa, suggesting that the microchannel resonators could have a pressure sensing range (dynamic range) suitable for many applications.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".