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Record W1983413180 · doi:10.1143/jjap.41.4626

Size-tunable Ge Nano-particle Arrays Patterned on Si Substrates with Nanosphere Lithography and Thermal Annealing

2002· article· en· W1983413180 on OpenAlexafffund
Nan Li, M. Zinke-Allmang

Bibliographic record

VenueJapanese Journal of Applied Physics · 2002
Typearticle
Languageen
FieldEngineering
TopicPhotonic and Optical Devices
Canadian institutionsWestern University
FundersAdvanced Foods and Materials Canada
KeywordsMaterials scienceNanosphere lithographyAnnealing (glass)OverlayerNanostructureFacetingLithographyNanotechnologyNano-GermaniumNanoparticleNanolithographySiliconOptoelectronicsComposite materialFabricationCrystallographyCondensed matter physics

Abstract

fetched live from OpenAlex

Experimental studies on patterning hexagonal Ge nanostructures have been conducted on Si substrates through deposition of Ge with latex nano-spheres as a mask. The size distribution of the patterned Ge dots is narrow with the full width at half maximum being less than 10% of the dot size. By thermal annealing, a shape transition of the Ge nanostructures from original triangular discs to spherical or three-dimensional faceting dots was observed at a temperature of 650°C on the Si substrate bearing an oxide overlayer. With this process, a size modulation of the annealed Ge nano-particles can be achieved by varying the thickness of the initial Ge deposition. With this nanosphere lithography technique hexagonally patterned arrays of Ge dots of ∼ 30 nm in diameter were fabricated on Si substrates.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.003

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.008
GPT teacher head0.182
Teacher spread0.174 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations21
Published2002
Admission routes2
Has abstractyes

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