Lorentz-force transduction for RF micromechanical filters
Bibliographic record
Abstract
This paper reports experimental results on the use of Lorentz-force transduction for RF micromechanical filters. The use of Lorentz-force transduction involves a significantly lower motional resistance compared to electrostatic methods. Clamped–clamped microbeams fabricated in CMOS35, PolyMUMPs and UW-MEMS are driven electrodynamically in the presence of an in-plane magnetic field. The out-of-plane vibrations of these microresonators are measured by the laser vibrometer to characterize their transduction performance. These measurements result in the identification of mode shapes and resonance specifications of the microresonators and provide data for motional resistance computations. These results that are confirmed by electrical measurements show significantly low values of motional resistance of the electrodynamically driven microresonators. Compared to electrostatic transduction, the computed motional resistance associated with Lorentz-force transduction is multiple orders of magnitude lower. Furthermore, Lorentz-force driving of clamped–clamped micromechanical resonators to higher modes up to ninth mode is demonstrated.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".