Low-loss photonic wires defined by local oxidation of silicon (LOCOS)
Bibliographic record
Abstract
We demonstrate low-loss photonic wire waveguides, in both the straight and bent waveguide configurations, fabricated by the LOCal Oxidation of Silicon (LOCOS) process, using the standard optical lithography. The oxidation in the LOCOS process produces waveguides in submicron dimensions with ultra-smooth sidewalls. The Full-Width Half- Maximum (FWHM) of the fabricated LOCOS wire waveguide is approximately 650 nm and the height is 280 nm. We used the cut-back method to measure the propagation loss of the TE (x-polarized) mode. The average propagation loss measured by the cut-back method was 8.78 dB/cm, while the minimum measured propagation loss achieved was 7.18 dB/cm for simple straight waveguides. The propagation loss is expected to be lower, as we include the scattering loss in the measurements. The measured bending loss of the LOCOS wire waveguide with a bending radius of 5 um is as low as 0.0089 dB/90° bend for the TE mode. To the best of knowledge, this is the first direct measurement in propagation loss and bending loss for LOCOS wire waveguides.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".