Single-Chip CMOS-MEMS Dual Mode Scanning Microwave Microscope
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Bibliographic record
Abstract
We present the design, fabrication and experimental validation of an integrated Scanning Microwave Microscopy (SMM)/Atomic Force Microscopy (AFM) system that does not require the use of a conventional laser-based AFM. Microfabricated SMM probes are collocated with piezoresistive strain-based sensing AFM probes in a CMOS-MEMS process, and are actuated by integrated electrothermal scanners. Integration of AFM enables dual mode imaging (topography and electrical properties) and more importantly, it enables control over tip-sample distance, which is crucial for accurate SMM imaging. This design is unique in the sense that the tip can be scanned over the sample in 3 degrees of freedom, over a <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$20\ \mu{\rm m}\times 10\ \mu{\rm m}\times 30\ \mu{\rm m}$</tex></formula> scan range in the x, y, and z directions respectively. We fabricate our device by using a standard foundry CMOS process followed by in-house maskless MEMS post processing to release the devices. Single-chip SMM/AFM devices with integrated 1-D and 3-D actuation are thus obtained. These devices can be used to modulate the tip-sample separation to underlying samples with a periodic signal, improving immunity to long-term system drifts. We also investigate the effect of tip-sample separation on the resolution of the instrument. To increase measurement sensitivity, a single-stub matching network has been used to match the high tip-to-sample impedance to the 50 ohm characteristic impedance of a performance network analyzer. Measurement results of the CMOS-MEMS SMM are presented to verify the proposed concept.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it