Contact damping in microelectromechanical actuators
Bibliographic record
Abstract
We examine the significance of the energy loss mechanisms active in electrostatic MEMS actuators. We find that the dominant loss mechanism changes depending on the actuator mode of operation. We find that the active mechanisms in the order of their significance are: fluid-structure interactions dominant for actuators operating in air, actuator-substrate interactions dominant for actuators in contact with a substrate under vacuum, and intrinsic loss mechanisms dominant for actuators in-flight under vacuum. Further, experimental results show that the quality factor of an electrostatic MEMS actuator drops drastically as the actuator first comes into line contact with a substrate. As the contact area expands along the actuator length, the quality factor increases. Measurements under 1 Torr vacuum show a three-fold increase in the quality factor as the contact area expands from a line to 30% of the actuator area. This increase in the quality factor is attributed to the drop in the contribution of friction forces into energy losses as contact expands and adhesion forces increase.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".