Dependence of the sputter-etching characteristics of strontium–titanate–oxide thin films on their structural properties
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Bibliographic record
Abstract
Sputter-etching characteristics of polycrystalline strontium–titanate–oxide (STO) thin films are investigated using a high-density argon plasma. STO thin films were grown by means of a reactive pulsed-laser deposition technique in which the buffer oxygen pressure was varied to change the structural properties of the films. The sputter-etch rate of the rf-biased films is found to linearly increase with the oxygen deposition pressure. This result is shown to be related to the corresponding decrease of the film density. This dependence of the etch rate on the structural properties of the films has very important consequences on etching studies and on the optimization of etching processes.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it