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Record W1996304422 · doi:10.1109/mwsym.2007.380101

A Novel Warped-Beam Design that Enhances RF Performance of Capacitive MEMS Switches

2007· article· en· W1996304422 on OpenAlexaff
R. Al‐Dahleh, Raafat R. Mansour

Bibliographic record

VenueIEEE MTT-S International Microwave Symposium digest · 2007
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsUniversity of Waterloo
Fundersnot available
KeywordsCapacitive sensingCapacitanceMicroelectromechanical systemsMaterials scienceDielectricFabricationOptoelectronicsElectrical engineeringElectronic engineeringEngineeringElectrodePhysics

Abstract

fetched live from OpenAlex

This paper presents the design, fabrication and testing of a novel electrostatically actuated capacitive shunt switch for X-band applications. By introducing warped bimetallic beams within the switch's geometry, the effective capacitive area is optimized to fine-tune the switch's RF performance in the 'off' state without influencing the switch's 'on' state performance. As a result, measurements show a drastic improvement where the down-state capacitance is doubled and the up-state capacitance is halved. Using this technique, a dual-warped switch with an off-to-on capacitive ratio of almost 170 is achieved without the need for thin dielectrics or high dielectric constant materials, exhibiting excellent RF performance and mechanical reliability.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.108
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.021
GPT teacher head0.233
Teacher spread0.213 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations10
Published2007
Admission routes1
Has abstractyes

Explore more

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