Electrical interconnection through optimized wirebonding onto SU-8 structures and actuators
Bibliographic record
Abstract
We present a thorough investigation into mechanisms to improve the wirebonding yield onto thick SU-8 MEMS structures and actuators using optimized processing conditions. The failure modes of electrical connections onto SU-8 structures have been determined and minimized through our investigations into device yield and bond strength. Primary failure modes of ball bonding are metal delamination from the SU-8 surface and plastic deformation of thicker structures at elevated ball bonding temperatures. Both failure modes can be reduced significantly by using hardbaking steps and surface activations prior to metal depositions. The best bonding results are achieved when micro-roughening of SU-8 is combined with a surface activation to improve metal adhesion to the SU-8 surface. SU-8 thermal actuators up to 40 µm thick have been successfully bonded and operated on a polymer MEMS chip to demonstrate a potential application.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".