Electronic Defect and Contamination Monitoring in Si Wafers Using Spectrally Integrated Photocarrier Radiometry
Bibliographic record
Abstract
The ability of spectrally integrated room-temperature photocarrier radiometry to image electronic defects and contamination in silicon wafers is presented. Amplitude and phase imaging contrast is a result of signal sensitivity to local variations in the recombination lifetime of photoexcited carriers. Experimental frequency scans are fitted to carrier density-wave theory to simultaneously obtain the recombination lifetime, diffusivity, and surface recombination velocities (front and back). Lifetime measurements are combined with lateral surface scans to produce quantitative lifetime imaging. Contaminated boron-doped silicon wafers with iron concentration ∼ 10 11 cm − 3 on a baseline of ∼ 5 × 10 9 cm − 3 have been successfully imaged and exhibit a much higher spatial resolution than surface photovoltage images. Recombination lifetime measurements before and after photodissociation of FeB pairs have been utilized for quantitative determination of iron concentration; however, lifetime accuracy limitations due to photodissociation by the excitation laser under medium-to-high optical injection levels required for photocarrier radiometric measurements compromise the accuracy of heavy ion (Fe) concentration measurements.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".