Integration of Niobium Low-Temperature-Superconducting RF Circuits With Gold-Based RF MEMS Switches
Bibliographic record
Abstract
A novel eight-mask fabrication process for the integration of low-temperature-superconducting niobium (Nb) RF circuits with gold-based RF microelectromechanical system (MEMS) switches is proposed. DC-contact and capacitive-contact RF MEMS switches integrated with Nb-based transmission lines are presented for the first time. A comparison of the RF performance of the switches at room and cryogenic temperatures indicate that the proposed gold-based MEMS fabrication process did have a major impact on the superconducting characteristics of Nb. A switched capacitor bank is also designed, implementing a dc-contact RF MEMS switch. The measured results of the capacitor bank show the variation of the capacitance value from 0.22 to 5.25 pF at 4 K. A thermal analysis of the devices under test (DUTs) is also performed, and an investigation is carried out to minimize the thermal loss between the chuck and the DUT.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".