Steady state discharge optimization in high-power impulse magnetron sputtering through the control of the magnetic field
Bibliographic record
Abstract
High-power impulse magnetron sputtering (HiPIMS) is a pulsed DC sputtering technique utilizing high power density peaks of typically more than 100 W cm−2. The discharge operation at such elevated powers can be hindered by the magnetron configuration (size and magnetic field) and/or the target conditions (e.g., material and thickness). In addition, target erosion is an important issue significantly affecting process reproducibility. In the present work, we propose a simple approach for the stabilization of the HiPIMS discharge by controlling the target magnetic field using paramagnetic spacers with different thicknesses in between the magnetron surface and the target. We demonstrate a straightforward discharge optimization, while using various target materials, such as Nb, Ta, Cr, Al, Ti, Si, and even C (graphite). The existence of a steady state high density discharge above the graphite target and the other targets in general is discussed in terms of the magnetic field configuration and the gas rarefaction effect.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".