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Record W2002929646 · doi:10.1063/1.1465122

Carbon incorporation pathways and lattice sites in Si1−yCy alloys grown on Si(001) by molecular-beam epitaxy

2002· article· en· W2002929646 on OpenAlexfundno aff
S. Y. Park, J. D’Arcy-Gall, Daniel Gall, Julio A. N. T. Soares, Y.-W. Kim, H. Kim, P. Desjardins, J. E. Greene, S. G. Bishop

Bibliographic record

VenueJournal of Applied Physics · 2002
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsnot available
FundersNatural Sciences and Engineering Research Council of CanadaCanada Research ChairsFundação de Amparo à Pesquisa do Estado de São PauloU.S. Department of Energy
KeywordsMaterials scienceMolecular beam epitaxyRaman spectroscopyX-ray photoelectron spectroscopyPhotoluminescenceElectron diffractionCrystallographyTransmission electron microscopyAb initio quantum chemistry methodsAb initioLattice constantEpitaxyDiffractionChemistryNanotechnologyNuclear magnetic resonanceMolecule

Abstract

fetched live from OpenAlex

We use a combination of in situ and postdeposition experimental probes together with ab initio calculations of strain coefficients and formation energies associated with specific C configurations in the Si lattice to determine C incorporation pathways and lattice site distributions in fully coherent Si1−yCy alloy layers grown by molecular-beam epitaxy on Si(001) as a function of deposition temperature Ts (380 °C–680 °C) and C fraction y (0–0.026). Lattice strain and Raman spectroscopy measurements demonstrate that all C, irrespective of y, is incorporated into substitutional lattice sites in Si1−yCy(001) layers grown at Ts⩽480 °C. Increasing Ts⩾580 °C leads to strong C surface segregation, as shown by in situ angle-resolved x-ray photoelectron spectroscopy, yielding additional pathways for C incorporation. Photoluminescence measurements indicate that an increasing fraction of the incorporated C in the higher-temperature layers resides in dicarbon complexes. Reflection high-energy electron diffraction and cross sectional transmission electron microscopy reveal surface roughening at Ts⩾580 °C with the formation of bulk planar structures, interconnected by {113} segments, that are periodic along [001] with a periodicity which decreases with increasing Ts. We interpret the planar structures as layers of C-rich Si1−yCy which form in the presence of excess surface C resulting from segregation. Our ab initio density functional calculations show that substitutional C arranged in an ordered Si4C phase is 0.34 eV per C atom more stable than isolated substitutional C atoms.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.030
Threshold uncertainty score0.548

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.014
GPT teacher head0.190
Teacher spread0.176 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations12
Published2002
Admission routes1
Has abstractyes

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