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Record W2005397548 · doi:10.1116/1.1320801

Oxygen plasma induced degradation in InGaAs/InP heterostructures

2000· article· en· W2005397548 on OpenAlexaff
R. Driad, W. R. McKinnon, S. P. McAlister

Bibliographic record

VenueJournal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsInstitute for Microstructural Sciences
Fundersnot available
KeywordsMaterials scienceHeterojunctionOptoelectronicsHeterojunction bipolar transistorPlasmaOxygenBipolar junction transistorDielectricBreakdown voltageCommon emitterVoltageTransistorChemistryElectrical engineering

Abstract

fetched live from OpenAlex

The effects of oxygen plasma conditions on the performance of InGaAs/InP heterostructure bipolar transistors (HBTs) have been studied by comparing the HBT’s characteristics, such as current gain and breakdown voltage, before and after treatment. The base–emitter junction characteristics of InGaAs/InP HBTs were unaffected by oxygen plasma treatments, for exposure periods of up to 10 min and rf powers <200 W. Higher rf powers degrade the current gain. In contrast, the base–collector junction was degraded even for short periods and low rf powers; the base–collector leakage current increased and the breakdown voltage decreased. Further reduction of the current gain was observed when dielectric films were deposited by plasma-enhanced chemical vapor deposition on oxygen treated devices. The dielectric film does not reduce the gain of devices that were not treated by oxygen plasma.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.003

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.013
GPT teacher head0.215
Teacher spread0.201 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations0
Published2000
Admission routes1
Has abstractyes

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