Shortening of Plasma Strip Process Resulting in Better Removal of Photo Resist after High Dose Implantation
Why this work is in the frame
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Bibliographic record
Abstract
A layer of hardened material (crust) forms on the surface of photo resist (PR) during the implantation. This crust can be described as highly cross-linked polymer [1, 2]. Its thickness and composition depends on the type of PR, implant species, energy, dose, temperature during implantation and other factors. The crust is very resistant against chemical attack. Its chemical resistance tends to increase with the continuous shrink of technology nodes as implant doses increase. Moreover, even small residues of PR, left after cleaning, become more critical with shrinking device geometry. The usual process sequence for stripping a PR after high dose implantation (HDI) is a plasma strip (PS) followed by a wet clean. The drawback of plasma ashing is increased substrate loss and dopant bleach [3]. Plasma strip or plasma ash stand in this paper for the approach of complete PR consumption in the plasma process. Wet stripping alone often is not sufficient for stripping PR after implant doses of ≥ 1x1015 ions/cm2.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.002 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.002 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.002 |
| Open science | 0.002 | 0.001 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it