Monolithic Wafer-Level Rectangular Waveguide and Its Transition to Coplanar Waveguide Line Using a Simplified 3-D Fabrication Process
Bibliographic record
Abstract
In this paper, we are introducing a new category of wafer-level micromachined rectangular waveguide devices and illustrate a new transition of these devices to Coplanar Waveguide (CPW) lines for millimeter-wave applications. The 3-D fabrication process used in this paper utilizes a combination of thin film and thick film processes and produces a simple three-mask fabrication process. As a result, all the on-wafer elements such as the waveguide, the CPW lines, and their transition are simultaneously fabricated, which eliminates the ever-existing requirement of hybrid assembly of the waveguide parts. A metalized post is employed to couple the signal from the CPW line to the waveguide. Unlike the previous designs that are mostly based on capacitive coupling, the proposed CPW to waveguide transition is based on inductive coupling, which simplifies the fabrication requirements and improves the performance. Here, the entire back-to-back structure is designed, fabricated, and measured on a 10 mm2wafer area. A wide-band RF performance is measured for the proposed waveguide structure. Our measured results show an insertion loss of as low as 1 dB at 72 GHz range. The proposed technique to realize wafer-level waveguides has great potential to include a variety of waveguide topologies including bends and arcs. Besides, this method allows for further expansion of the topic to integrate MEMS components inside the waveguide.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".