Commercial plexiglass mirrors and MEMS: new approach toward low cost polymer microsystems
Bibliographic record
Abstract
This paper presents a new approach to fabricate low cost metallization on PMMA substrates based on commercially available Mirrored-Extruded Acrylic (mirrored Plexiglass / mirrored PMMA). The patterned metal could be subsequently employed as a mask for deep-UV PMMA micropatterning of polymer-MEMS devices. The process presented eliminates the use of sputtered metals and can be scaled up to substrates of sizes 12 inch × 24 inch or larger for batch fabrication. Mirrored Extruded Acrylic has a coating of 6 micron thick vacuum metalized aluminum or copper with an adhesive backing. We have discovered that the adhesive backing can be easily etched away by using ethanol, exposing the aluminum or copper, which can be micropatterned by standard photolithographic processes. We have fabricated various microstructures in aluminum, including microelectrodes and Van de Paw structures. Resistivity measurements show that the resistivity of the micro-machined aluminum is equal to lower than 4.8 × 10-6 Ω-m, which is sufficient for sensor electrodes or signal routing applications for MEMS/ MST devices.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.005 | 0.002 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".