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Record W2009484617 · doi:10.1063/1.2937249

Modeling self-annealing kinetics in electroplated Cu thin films

2008· article· en· W2009484617 on OpenAlexafffund
M. Stangl, Matthias Militzer

Bibliographic record

VenueJournal of Applied Physics · 2008
Typearticle
Languageen
FieldMaterials Science
TopicCopper Interconnects and Reliability
Canadian institutionsUniversity of British Columbia
FundersNatural Sciences and Engineering Research Council of CanadaAllianz Industrie Forschung
KeywordsElectroplatingAnnealing (glass)Materials scienceKineticsElectrolyteRecrystallization (geology)Thin filmMicrostructureCopperMetallurgyComposite materialElectrodeNanotechnologyChemistryPhysical chemistry

Abstract

fetched live from OpenAlex

Electroplated Cu films exhibit a microstructure evolution at room temperature, called self-annealing. The kinetics of this recrystallization process is strongly influenced by plating conditions in the form of Cu film thickness, current density, and additive content in the electrolyte. Existing models have been used and improved to describe the kinetics of self-annealing. This gives the possibility to evaluate the influence of processing parameters and predict self-annealing behavior of electroplated Cu thin films.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.001
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Simulation or modeling · Consensus signal: Simulation or modeling
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.009
Threshold uncertainty score0.018

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.001
Meta-epidemiology (narrow)0.0000.001
Meta-epidemiology (broad)0.0000.001
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0010.000
Research integrity0.0010.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.017
GPT teacher head0.238
Teacher spread0.221 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designSimulation or modeling
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations17
Published2008
Admission routes2
Has abstractyes

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