PECVD of Nanocrystalline Si Layers on High‐<i>T</i><sub>g</sub> Polymer Substrates
Bibliographic record
Abstract
Abstract Summary: Hydrogenated nanocrystalline silicon (nc‐Si:H) was deposited by plasma‐enhanced chemical vapor deposition (PECVD) on transparent polymers in order to qualify these for possible use as electronic substrates. As a first step, plasma etch experiments in pure H2 revealed small etch rates for these materials. Thin films of nc‐Si:H were then deposited on samples placed on the grounded electrode of a “Reinberg”‐type parallel plate RF (13.56 MHz) PECVD reactor, at various substrate temperatures (25 °C ≤ Ts ≤ 250 °C), using SiH4 diluted in H2 as the feed‐gas. Thermally induced failure of the nc‐Si:H/polymer composite was avoided within a certain range of deposition conditions, permitting structural and electrical characterization of the deposits. Temperature‐dependent conductivity, σ(T), for nanocrystalline silicon (nc‐Si:H) films on glass and three polymer substrates, all deposited at Ts = 175 °C. magnified image Temperature‐dependent conductivity, σ(T), for nanocrystalline silicon (nc‐Si:H) films on glass and three polymer substrates, all deposited at Ts = 175 °C.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".