Hydrogen blistering of silicon: Effect of implantation temperature, isotope dependence, and key role of dynamic annealing
Bibliographic record
Abstract
Blistering of (001) Cz–Si crystals (>1Ωcm), by either protium (H) or deuterium (D) ions of 5keV energy, was studied as a function of the sample temperature during implantation in the range of 150–450K. It was found that the blistering dose thresholds decreased with temperature, and very dramatically so in the case of D ions, revealing new aspects of the giant isotope effect. An optimal implantation temperature for ion cutting was found around 100°C, where the required dose is reduced and the isotope effect is minimized. The results are interpreted in terms of models of the interaction of implanted hydrogen with radiation defects, and they show that dynamic annealing is incomparably more efficient in promoting blistering than purely thermal annealing.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".