Dry etch fabrication of porous silicon using xenon difluoride
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Bibliographic record
Abstract
The authors report the fabrication of porous silicon material using a xenon difluoride (XeF2) dry etching technique. Using a XeF2 fabrication process, porous silicon can be formed selectively on silicon by employing a standard hard-baked photoresist layer as a masking layer. The authors demonstrate porous silicon with different pore sizes and configurations rendering this material as an attractive candidate for a wide spectrum of potential applications. The pore size, porosity and thickness of the various developed porous silicon samples were characterised with electron microscopy and optical reflectance measurements. This XeF2 etching technique offers flexible and straightforward fabrication of porous silicon and could allow simple monolithic integration of porous silicon devices with microelectronic circuitry, following the current trend of integrated microsystems.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it