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Record W2017371738 · doi:10.1116/1.1286394

Three-dimensional simulation of film microstructure produced by glancing angle deposition

2000· article· en· W2017371738 on OpenAlexaff
T. Smy, D. Vick, Michael J. Brett, S. K. Dew, Andong Wu, Jeremy C. Sit, Kenneth D. Harris

Bibliographic record

VenueJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000
Typearticle
Languageen
FieldMaterials Science
TopicOptical Coatings and Gratings
Canadian institutionsUniversity of AlbertaCarleton University
Fundersnot available
KeywordsDeposition (geology)Materials scienceThin filmSubstrate (aquarium)MicrostructureScanning electron microscopePhysical vapor depositionNanotechnologyOpticsSimulationComputer scienceComposite materialPhysics

Abstract

fetched live from OpenAlex

A novel three-dimensional (3D) ballistic deposition simulator 3D-FILMS has been developed for the modeling of thin film deposition and structure. The simulator features a ballistic transport algorithm to model incident species with angular distributions appropriate to physical vapor deposition systems. Two-tiered data structuring is employed in order to enable the simulator to run using memory resources available to workstations. The simulator has been applied to a unique class of thin films grown by the technique of glancing angle deposition (GLAD). These films exhibit low bulk density due to an internal structure consisting of isolated microcolumns, which can be engineered into a variety of 3D forms. Because of their inherent 3D morphology, created by a combination of complex substrate motion and 3D shadowing, GLAD films represent an ideal test subject for 3D simulation. Scanning electron microscope images of films are presented together with simulation results, which correctly reproduce aspects of column morphology, column growth competition and extinction, and film bulk density.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.001
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Simulation or modeling · Consensus signal: Simulation or modeling
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.010
Threshold uncertainty score0.020

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.001
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0010.000
Open science0.0010.000
Research integrity0.0010.000
Insufficient payload (model declined to judge)0.0030.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.006
GPT teacher head0.235
Teacher spread0.229 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designSimulation or modeling
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations86
Published2000
Admission routes1
Has abstractyes

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