Design and modeling of a high accuracy three degrees of freedom MEMS manipulator
Bibliographic record
Abstract
A new design for a high accuracy, 3-degree of freedom (DOF) MEMS manipulator is proposed. The 3-DOF robotic manipulator is to be used for biomedical applications such as cell probing, tissue sampling, neuron signal reading and drug delivery, in which high accuracy and repeatability of positioning is required. While sensing or imaging elements are not available in the integration with the manipulator to provide feedback for positioning, we investigated a calibration approach to minimize the positioning errors. In-plane and vertical MEMS thermal actuators are chosen to perform the required tasks. The modeling of the thermal actuators was first studied and the results match with experimental results. A calibration algorithm is implemented to allow the minimization of accumulated motion errors. The algorithm was successfully applied to the manipulator and results were obtained. A MATLAB script was written to simplify the calibration procedure. Problems faced in the design and potential solutions will be also discussed.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.001 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.003 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".