F 2 -laser micropatterning of chrome-coated CaF 2 for vacuum-ultraviolet masks
Bibliographic record
Abstract
Chrome-on-quartz optics serve multi-functions including high-resolution masks for UV lithography. At the next node down, F<sub>2</sub>-laser lithography demands alternate high-transparency substrates such as wide-bandgap CaF<sub>2</sub>. We present here a direct-write method of F<sub>2</sub>-laser ablation for selective removal of 110-nm thick chrome films on CaF<sub>2</sub> and SiO<sub>2</sub> (fused silica) substrates. Laser-processing parameters are presented for micropatterning of the chrome film with minimal damage to the underlying substrates. Damage thresholds, ablations rates, incubation processes, and surface morphology of the chrome and CaF<sub>2</sub> are described together with methods that reduce ablation debris and collateral damage. Laser-patterned masks are tested in a 157-nm optical projection system at 30-mJ/cm<sup>2</sup> fluence for sub-micron laser structuring of glass and other materials.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.001 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".