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Record W2019433114 · doi:10.1016/j.proeng.2011.12.014

A novel dynamic pull-in MEMS gyroscope

2011· article· en· W2019433114 on OpenAlexaff
Mrigank Sharma, Élie Sarraf, Edmond Cretu

Bibliographic record

VenueProcedia Engineering · 2011
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsUniversity of British Columbia
Fundersnot available
KeywordsGyroscopeAccelerometerAccelerationMicroelectromechanical systemsVoltagePhysicsVibrating structure gyroscopeEquivalent circuitNonlinear systemMaterials scienceAcousticsOptoelectronicsClassical mechanics

Abstract

fetched live from OpenAlex

The present paper analyzes numerically and experimentally the dependence of the dynamic pull-in voltage amplitude on the values of externally-induced accelerations (e.g. Coriolis accelerations in the case of vibratory gyroscopes). We have investigated the nonlinear dynamic behavior on two different device types, a micro-gyroscope (A) and a micro-accelerometer (B), both fabricated in the SOI-MUMPs process (25 μm thick structural layer). Experimental measurements on the MEMS structures have been performed using Polytec MSA-500 equipment for analyzing the mechanical motion. They indicate that the dynamic pull-in voltages reduce from 100 V to 56 V for device A and from 21.77 V to 17.3 V for device B, for an equivalent acceleration of 0.319 ms-2, when the structures are actuated at their resonance frequency. If the induced acceleration is translated into an equivalent angular rate, _ equivalent, modulating the Coriolisinduced motion, the dynamic pull-in voltages vary from 57.612 V to 56.5 V for device A type and from 20.9 V to 10.75 V for device B type, for a change of 1 rad/s to 5 rad/s in _equivalent.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.001
Threshold uncertainty score0.004

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0010.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.012
GPT teacher head0.192
Teacher spread0.180 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations9
Published2011
Admission routes1
Has abstractyes

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