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Record W2020406107 · doi:10.1116/1.1676345

Raman and transmission electron microscopy study of disordered silicon grown by molecular beam epitaxy

2004· article· en· W2020406107 on OpenAlexaff
Li‐Lin Tay, D. J. Lockwood, J.‐M. Baribeau, Xiaolan Wu, G. I. Sproule

Bibliographic record

VenueJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004
Typearticle
Languageen
FieldEngineering
TopicThin-Film Transistor Technologies
Canadian institutionsNational Research Council CanadaInstitute for Microstructural Sciences
Fundersnot available
KeywordsRaman spectroscopyAmorphous solidMaterials scienceTransmission electron microscopyMolecular beam epitaxySiliconAmorphous siliconAnalytical Chemistry (journal)EpitaxyCrystalliteCrystalline siliconCrystallographyLayer (electronics)NanotechnologyChemistryOptoelectronicsOpticsMetallurgy

Abstract

fetched live from OpenAlex

Silicon films were deposited by molecular beam epitaxy onto crystalline silicon (c-Si) and native oxide on c-Si (001) substrates at temperatures ranging from 98 to 572 °C. Raman spectroscopy of these films showed that both the short-range disorder and intermediate-range disorder decreases as the deposition temperature increases. The onset of a phase transition in the amorphous Si films can be effectively identified by the appearance of the polycrystalline and crystalline Si Raman bands, which allowed quantification of the crystalline volume fractions present. Both the transmission electron microscopy and Raman results confirmed that films grown on the amorphous substrates at temperatures less than 414 °C are entirely amorphous, but exhibit c-Si features at higher temperatures. Films grown on c-Si substrates exhibit a characteristic limiting thickness for epitaxy and the transformation of the resulting upper amorphous layer into crystalline form takes place at a much lower temperature (∼290 °C) than for the amorphous substrates.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.003

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.003
GPT teacher head0.222
Teacher spread0.219 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations31
Published2004
Admission routes1
Has abstractyes

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