A Simple Method for Adhesive Bonding of Capacitive Pressure Sensors
Bibliographic record
Abstract
We have developed a simple, low cost technique using new materials to bond capacitance pressure sensors. The old methods have difficult processes when a metal trace on the bonding area perturbs the sealing. The new method uses a polymeric gap-controlling block between glass and silicon wafers and a heat curing adhesive which penetrates between them due to capillary force. We used two different materials including SU-8™ and UV (ultraviolet) curing adhesive in order to control the gap. The technique allows us to generate a small gap between the chips due to low viscosity of the heat curing adhesive, align and bond chips immediately, make a strong bond, and easily seal the sensor. Also, the high temperature, strong heat curing adhesive makes the sensor suitable for high temperature and high pressure applications. The sensors were tested up to 2 MPa and 170°C in a nitrogen chamber. The maximum thermal error of ±1.74% and ±1% full scale output (FSO) were measured for SU-8 and UV sensors, respectively.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.001 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.001 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.001 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.005 | 0.002 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".