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Record W2021785861 · doi:10.1115/imece2010-39123

A Simple Method for Adhesive Bonding of Capacitive Pressure Sensors

2010· article· en· W2021785861 on OpenAlexaff
Abdolreza Mohammadi, Mu Chiao

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsUniversity of British Columbia
Fundersnot available
KeywordsAdhesiveMaterials scienceCuring (chemistry)Composite materialCapacitive sensingWaferCapacitanceWafer bondingBond strengthUltravioletPressure sensorAnodic bondingOptoelectronicsUV curingAdhesive bondingSiliconMechanical engineeringElectrical engineeringElectrode

Abstract

fetched live from OpenAlex

We have developed a simple, low cost technique using new materials to bond capacitance pressure sensors. The old methods have difficult processes when a metal trace on the bonding area perturbs the sealing. The new method uses a polymeric gap-controlling block between glass and silicon wafers and a heat curing adhesive which penetrates between them due to capillary force. We used two different materials including SU-8™ and UV (ultraviolet) curing adhesive in order to control the gap. The technique allows us to generate a small gap between the chips due to low viscosity of the heat curing adhesive, align and bond chips immediately, make a strong bond, and easily seal the sensor. Also, the high temperature, strong heat curing adhesive makes the sensor suitable for high temperature and high pressure applications. The sensors were tested up to 2 MPa and 170°C in a nitrogen chamber. The maximum thermal error of ±1.74% and ±1% full scale output (FSO) were measured for SU-8 and UV sensors, respectively.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.038
Threshold uncertainty score0.284

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.011
GPT teacher head0.277
Teacher spread0.266 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations3
Published2010
Admission routes1
Has abstractyes

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