Application of a mid-infrared fiber bundle in remote measurement of gas concentrations in a chemical vapor deposition chamber
Bibliographic record
Abstract
A fiber bundle has been designed for measurement of gas concentrations in a chemical vapor deposition (CVD) chamber. The bundle is broadband, covering the spectrum range from 500 to 6000 cm(-1). Using this bundle, we have designed Fourier Transform infrared (FTIR) sampling configurations with reduced beam divergence (from 0.4 to 0.1 rad) and focal spot diameters (from 12 to 4 mm). The FTIR spectrum of tetraethoxysilane vapors in a CVD chamber was determined with the bundle and modified SAM connectors. An ellipsoid reflector was designed that yielded improved signal-to-noise ratios (SNR's) in the fiber-based spectra by a factor of 2. The incorporation of this reflector in spectrometers by use of the fiber bundle has the potential to reduce the sampling times for spectra while retaining acceptable SNR's.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".