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Study on Predicting the Deformed Membranes Based on Silicon Nitride Materials with New Deflection Functions for Calculating the Capacitance of Circular Diaphragm CMUTs

2013· article· en· W2027076427 on OpenAlexaff
Xu Dong Suo, Wei Sun, Zheng Dong Sun, John T. W. Yeow

Bibliographic record

VenueAdvanced materials research · 2013
Typearticle
Languageen
FieldEngineering
TopicUltrasonics and Acoustic Wave Propagation
Canadian institutionsUniversity of Waterloo
Fundersnot available
KeywordsCapacitanceDeflection (physics)Materials scienceCapacitive sensingSilicon nitrideMicroelectromechanical systemsCapacitive micromachined ultrasonic transducersDiaphragm (acoustics)AcousticsTransducerElectronic engineeringStructural engineeringSiliconOptoelectronicsComposite materialPiezoelectricityEngineeringOpticsElectrical engineeringPhysicsVibration

Abstract

fetched live from OpenAlex

A new idea is presented which develops a general model predicting the deflection profile of clamped circular diaphragm of Capacitive Micromachined Ultrasonic Transducers (CMUTs) in order to calculate its capacitance. The CMUTs we consider is made of silicon nitride material which is widely used because of its low intrinsic stress. And the general model proposed in this paper is highly accurate in predicting the deformed membranes and exhibits excellent agreement with 3D-FEA results in capacitance deviation less than 1%. These new established deflection functions can be used to implement a much higher accurate design methodology for CMUTs and other MEMS-based capacitive type sensors built with circular diaphragm.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.001
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.124
Threshold uncertainty score0.415

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.001
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.038
GPT teacher head0.296
Teacher spread0.258 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations0
Published2013
Admission routes1
Has abstractyes

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