Void-Free Room-Temperature Silicon Wafer Direct Bonding Using Sequential Plasma Activation
Bibliographic record
Abstract
Room-temperature Si/Si wafer direct bonding has been performed by an optimized sequential plasma activated bonding process. A shorter O 2 reactive ion etching (RIE) plasma (∼10 s) treatment followed by treatment with N 2 radicals for 60 s is used for surface activation. The activated wafers are brought into contact in ambient air. After storage at room temperature for 24 h, high bonding strength (∼2.25 J/m 2 ) is achieved without requiring any annealing process. This value is close to the bulk-fracture strength of silicon. Furthermore, no annealing voids are observed at Si/Si interfaces even if the bonded wafer pairs are heated from 200 to 800 °C in subsequent processes. The bonding interfaces and their optical transmittances are also investigated. This void-free, room-temperature bonding technique based on sequential plasma activation is inexpensive and suitable for the microelectromechanical system manufacturing process and wafer-scale packaging.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.001 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".