A unified interdiffusivity model and model verification for tensile and relaxed SiGe interdiffusion over the full germanium content range
Bibliographic record
Abstract
An interdiffusivity model was established for SiGe interdiffusion under tensile or relaxed strain over the full Ge content (xGe) range (0 ≤ xGe ≤ 1), which is based on the correlations between self-diffusivity, intrinsic diffusivity, and interdiffusivity. It unifies available interdiffusivity models over the full Ge range and applies to a wider temperature range up to 1270 °C at the xGe = 0 end and to 900 °C at the high xGe = 1 end. Interdiffusion experiments under soak and spike rapid thermal annealing conditions were conducted to verify the model. Literature interdiffusion data under furnace annealing conditions were also used for the same purpose. The interdiffusivity model of this work has been implemented in major process simulation tools, and the simulation results showed good agreement with experimental data under furnace annealing and soak and spike rapid thermal annealing conditions. This work demonstrated a new approach in studying SiGe interdiffusion, which has the advantage of studying interdiffusion under non-isothermal annealing conditions.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.002 |
| Bibliometrics | 0.001 | 0.000 |
| Science and technology studies | 0.001 | 0.001 |
| Scholarly communication | 0.001 | 0.002 |
| Open science | 0.002 | 0.001 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".