Metalorganic vapor phase diffusion using DMZn Part II: Determination of the interstitial zinc charge state from secondary ion mass spectroscopy measurements using the Boltzmann–Matano technique
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Bibliographic record
Abstract
Zinc is diffused into undoped InP epitaxial layers in a metalorganic chemical vapor deposition reactor using DMZn as a source. Using an interstitial-substitutional model, the effective diffusivity of zinc in undoped InP is expressed uniquely as a function of the sum of the zinc–phosophorous vacancy complex and substitutional zinc concentrations assuming a negligible interstitial zinc concentration. Boltzmann–Matano analysis of secondary ion mass spectroscopy profiles for the total zinc concentration supports a neutral (m=0) charge on the interstitial zinc.
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Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.001 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
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