A low-noise high-sensitivity readout circuit for MEMS capacitive sensors
Bibliographic record
Abstract
This paper presents a differential low-noise high-resolution switched-capacitor readout circuit that is intended for capacitive sensors. Amplitude modulation/demodulation and correlated double sampling are used to minimize the adverse effects of the amplifier offset and flicker (1/f) noise and improve the sensitivity of the readout circuit. In order to simulate the response of the readout circuit, a Verilog-A model is used to model the variable sense capacitor. The interface circuit is designed and laid out in a 0.8 μm CMOS process. Post-layout simulation results show that the readout interface is able to linearly resolve sense capacitance variation from 2.8 aF to 0.3 fF with a sensitivity of 7.88 mV/aF from a single 5V supply (the capacitance-to-voltage conversion is approximately linear for capacitance changes from 0.3 fF to ~1.2 fF). The power consumption of the circuit is 9.38 mW.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".