Measurement of MEMS thermal actuator time constant using image blur
Bibliographic record
Abstract
A method of experimentally determining the time constants of MEMS thermal actuators from an analysis of blurred still camera images of high frequency motion is presented. The response of MEMS thermal actuators to harmonic excitation falls off with increasing frequency. An analytical derivation of the thermal frequency response is performed considering actuator arm conduction and conduction through air to the substrate. For the actuator in this study, the predicted time constant is 120–125 µs. Directly measuring this time constant would require sampling in the kHz range, well above the range of most cameras, which blur the image. The thermal time constant is computed by analyzing the sidewall profiles of a stationary actuator and of the actuator excited over a range of frequencies. The observed slope of the blurred sidewall profile changes with the frequency: the larger the amplitude of motion, the shallower the apparent slope. By numerically blurring the stationary profile, the relationship between the blur amplitude and the blurred slope is found. From this and the measured slopes, the blur amplitude is determined at each frequency and the time constant determined by curve fitting. The resultant measured time constant is 130 ± 12 µs, in good agreement with the predicted value.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".