MEMS-Based Batch-Mode Micro-Electro-Discharge Machining using Microelectrode Arrays Actuated by Hydrodynamic Force
Bibliographic record
Abstract
This paper reports a batch-mode micro-electro-discharge machining technique that is enabled by the actuation of the suspended microelectrode arrays fabricated on the workpiece using the flow of the machining fluid. The electrode devices are microfabricated to be the double-layer construction that has 25-mum-thick copper electrodes with custom patterns on the bottom of the 18-mum-thick planar structures suspended above the workpiece surfaces. The built-in capacitance of the electrode device is utilized to construct a resistance-capacitance pulse generation/timing circuit. The suspended planar electrodes are advanced into the workpiece material with the hydrodynamic force while sustaining high-frequency discharge pulses, removing the workpiece material. Arrays of microstructures with 26-mum depth were machined in stainless steel using the machining voltage of 90 V. The dynamic behavior of the built-in capacitance of the double-layer electrode devices with the actuation was experimentally evaluated.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".