Realization of a new class of monolithic RF MEMS waveguide switches for millimeter-wave applications
Bibliographic record
Abstract
A new category of monolithic RF MEMS waveguide switches for the millimeter-wave application is presented in this paper. The switches are based on monolithic integration of highly deflected RF MEMS actuators (cantilever beams) inside the waveguide channel. The waveguide structure and the MEMS components are simultaneously fabricated using a monolithic 8-mask fabrication process. It is shown that the actuators in the UP state virtually generate a conductive wall that can be used to reroute the signal and design various waveguide switch structures. When the actuators are pulled down, they coincide with the inner wall of the waveguide and are completely removed from the signal path. To prove the concept, a monolithic waveguide “Short” using the curled-up MEMS actuators is fabricated and the results are compared to a solid wall for the frequency band of 60 GHz-75 GHz. The idea is then generalized to show the feasibility of multiport structures such as C-type switch.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".