Characterization of GaAs(110) Nitrided by an Electron-Cyclotron Resonance Plasma Source Using N[sub 2]
Bibliographic record
Abstract
Single‐wavelength in situ ellipsomeny shows that the SiN x : H / GaAs ( 110 ) interface formed during the deposition of silicon nitride using an electron‐cyclotron resonance nitrogen plasma source with silane introduced downstream is created by the initial nitridation reaction of the substrate. Angle‐dependent X‐ray photoelectron spectroscopy shows that the nitridation of GaAs forms a GaN layer separated from the substrate by a layer with As‐N bonds, and spectroscopic ellipsometry indicates that the GaN layer has a large void fraction. Interface‐state densities in the low 10 12 eV − 1 cm − 2 range measured on SiN x : H / Si / GaAs ( 110 ) capacitors did not change significantly if a Si interface control layer 0.8–2 nm thick was deposited on cleaved GaAs(110) surfaces prior to silicon nitride deposition. © 2000 The Electrochemical Society. All rights reserved.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".