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Record W2044803258 · doi:10.1116/1.2162573

Thermal coupling in multishot laser microvia drilling for interconnection application

2006· article· en· W2044803258 on OpenAlexaff
Bo Tan, Krishnan Venkatakrishnan

Bibliographic record

VenueJournal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006
Typearticle
Languageen
FieldEngineering
TopicLaser Material Processing Techniques
Canadian institutionsToronto Metropolitan University
Fundersnot available
KeywordsInterconnectionMaterials scienceCoupling (piping)NanosecondLaserDeformation (meteorology)DrillingThermalLaser drillingOpticsElectronic engineeringComposite materialEngineeringMetallurgyTelecommunications

Abstract

fetched live from OpenAlex

Microvia for interconnect application was drilled using multishot laser pulses of nanosecond duration. It is observed that time delay between successive pulses have an effect on the shape of the drilled microvias. There is a thresholdlike time delay at which microvia suffers an abrupt deformation which creates voids and complication in the subsequent metallization process. Thermal coupling between successive pulses could be used to explain this phenomenon. To avoid deformation, a longer time delay between subsequent pulses is preferred.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.001
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.004

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.001
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0000.001
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.008
GPT teacher head0.214
Teacher spread0.206 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations7
Published2006
Admission routes1
Has abstractyes

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