Investigation of nickel as hard mask for patterning multicomponent oxide materials in chlorine plasmas
Bibliographic record
Abstract
It is found that in specific Cl2 plasma conditions, using a nickel hard mask over calcium barium niobate, CBN (a material particularly difficult to etch) significantly improves both sidewall angles and etching selectivity. This mask hardening is due to the competition between NiCl2 growth and etching during the process. For applied bias voltage higher than the Ni sputtering threshold and substrate temperatures higher than 200 °C, this competition results in net NiCl2 growth which drastically improves the etching selectivity. This mask hardening was successfully used to define an optical waveguide with 73° sidewall angle in a 1 μm-thick CBN layer. This effect can potentially be used for the etching of a very large number of complex oxides that are known to be inert and very difficult to etch.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".