THROUGH SILICON VIAS INTEGRABLE WITH THIN-FILM PIEZOELECTRIC STRUCTURES
Why this work is in the frame
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Bibliographic record
Abstract
This paper reports on the design and microfabrication of novel through silicon vias (TSV) that are compatible with high-temperature processing of piezoelectric structures. The present approach uses metal deposition in cavities etched in the SOI handle layer of the wafer and electrically isolated islands in the device layer. This design avoids the shortcomings of previous TSV designs, which either introduce large topologies on the wafer surface, include metals that cannot sustain high-temperature processing or use poor electrical insulators. TSVs microfabricated using this new approach exhibit good performance, specifically small resistance between the front and backside metal pads, isolation from the ground plane and small capacitance between the vias and the ground. These TSVs are eminently suitable for devices requiring high-temperature processing, such as thin-film piezoelectric sensors and actuators.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it