In Situ Spectroscopic Ellipsometry Study of Plasma-Enhanced ALD of Al<sub>2</sub>O<sub>3</sub>on Chromium Substrates
Bibliographic record
Abstract
Atomic layer deposition (ALD) of aluminum oxide thin films on chromium substrates was studied using in situ spectroscopic ellipsometry (SE). The study of the initial stages of ALD film growth on metal surfaces is an important topic in the emerging field of metal-insulator-metal (MIM) fabrication. Chromium substrates were prepared by DC magnetron sputtering and were transferred under vacuum into an ALD reaction chamber. Formation of a thin layer of chromium oxide was observed during the initial cycles of plasma-enhanced ALD of aluminum oxide. The thickness of this interfacial oxide layer depends on various process parameters including deposition temperature, order of precursors and plasma pulse length. The interfacial oxide layer was absent during thermal ALD. FTIR measurements confirmed that the Cr/Al 2 O 3 interface is affected by the type of ALD (thermal or plasma-enhanced).
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".